Measurement apparatus and method for measuring surface shape and roughness

Measurement apparatus and method for measuring surface shape and roughness

  • CN 101,802,544 A
  • Filed: 08/14/2008
  • Published: 08/11/2010
  • Est. Priority Date: 08/24/2007
  • Status: Active Application
First Claim
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1. measuring equipment comprises:

  • Illumination light is provided with the unit, is used to be provided with have and be formed on the surface of measuring object and the illumination light of the corresponding optical characteristics of microstructure that will measure;

    Measuring unit is used to measure the reflected light when utilizing described illumination light to shine described measuring object;

    AndExtraction unit is used for from the measured reflected light extraction and the surface configuration and the relevant information of lip-deep microstructure that is formed on described measuring object of described measuring object.

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