Coated substrates and semiconductor devices including the substrates

Coated substrates and semiconductor devices including the substrates

  • CN 101,827,954 A
  • Filed: 09/04/2009
  • Published: 09/08/2010
  • Est. Priority Date: 09/05/2008
  • Status: Active Application
First Claim
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1. method of making the optical module base material may further comprise the steps:

  • By chemical vapour deposition process deposition of antiglare layer on the first surface of described base material;

    By sputter deposit transparent conductive layer on the second surface of described base material.

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