Imaging optical system and projection exposure apparatus

Imaging optical system and projection exposure apparatus

  • CN 101,836,165 A
  • Filed: 10/11/2008
  • Published: 09/15/2010
  • Est. Priority Date: 10/26/2007
  • Status: Active Application
First Claim
Patent Images

1. the imaging optical system (7) that has a plurality of mirrors (M1 to M6), these a plurality of mirrors (M1 to M6) are imaged onto the thing field (4) in the object plane (5) as the image field (8) in plane (9), and it is recently characterized by following:

  • The maximum incident angle of the imaging (3) on the reflecting surface of-all mirrors (M1 to M6)-and the picture number formulary value aperture of described imaging optical system (7)This is than less than 33.8 °

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