Laser irradiating device, laser irradiating method, and semiconductor manufacture method

Laser irradiating device, laser irradiating method, and semiconductor manufacture method

  • CN 101,879,658 A
  • Filed: 08/02/2002
  • Published: 11/10/2010
  • Est. Priority Date: 08/03/2001
  • Status: Active Application
First Claim
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1. laser irradiating device, it comprises:

  • A plurality of laser instruments;

    Isolator;

    Be used for the shape of a plurality of laser beams on irradiating surface formed the device of ellipse or rectangle;

    AndBe used for moving the irradiation position of a plurality of laser beams on irradiating surface in the opposite direction, and move the device of the irradiation position of a plurality of laser beams on irradiating surface along second direction along first direction with first party.

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