Semiconductor device and manufacture method thereof and electronic equipment

Semiconductor device and manufacture method thereof and electronic equipment

  • CN 101,916,785 B
  • Filed: 06/14/2004
  • Issued: 08/05/2015
  • Est. Priority Date: 06/20/2003
  • Status: Active Grant
First Claim
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1. a semiconductor device, is characterized in that, possesses:

  • Active layer, it is by ZnO or Mg xzn 1-xthe polycrystalline state of O, noncrystalline state or polycrystalline state mix the state existed semiconductor with noncrystalline state forms, and is added with nitrogen and hydrogen, AndSlider, it makes described active layer, and the region of the removable electric charge movement in described active layer is not subject in the scope of impact of atmosphere, with gas isolating,Described active layer is more than containing the kind of 1 in nitric oxide or nitrogen dioxide, is formed with atmosphere more than steam, hydrogen peroxide or a kind in the middle of them,The doping of nitrogen and hydrogen is, is controlled by the threshold voltage of the gate electrode voltage of semiconductor device as the amount in the scope of 0V ~ 3V,Described slider is made up of different separators,Formed in the described separator at interface with described active layer beyond 2 electrodes be connected with described active layer, the separator insulated between the control electrode and described active layer of the movement to the removable electric charge controlled in described active layer is formed beyond the region at interface, the described separator at interface is formed, by SiO with described active layer 2, Al 2o 3, AlN, MgO, Ta 2o 5, TiO 2, ZrO 2, stab-ZrO 2, CeO 2, K 2o, Li 2o, Na 2o, Rb 2o, In 2o 3, La 2o 3, Sc 2o 3, Y 2o 3, KNbO 3, KTaO 3, BaTiO 3, CaSnO 3, CaZrO 3, CdSnO 3, SrHfO 3, SrSnO 3, SrTiO 3, YScO 3, CaHfO 3, MgCeO 3, SrCeO 3, BaCeO 3, SrZrO 3, BaZrO 3, LiGaO 2, LiGaO 2mixed crystal system (Li 1-(x+y)na xk y) (Ga 1-zal z) O 2or the solid solution containing at least 2 kinds in the middle of them is formed.

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