Towards the Parameter Variation simulation system of semiconductor manufacturing facility functional simulation

Towards the Parameter Variation simulation system of semiconductor manufacturing facility functional simulation

  • CN 101,957,879 B
  • Filed: 09/25/2010
  • Issued: 12/02/2015
  • Est. Priority Date: 09/25/2010
  • Status: Active Grant
First Claim
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1. an operational factor Changing Pattern simulation system for semiconductor manufacturing equipment functional simulation-oriented, is characterized in that, comprising:

  • System interface interface, described system interface interface provides unified interface to call described operational factor Changing Pattern simulation system to make other analogue systems to other analogue systems;

    PID Changing Pattern module, described PID Changing Pattern module comprises the structure preserving PID configuration parameter, PID class wherein provides PID calling interface, and wherein, other analogue systems are by transmitting suitable parameter to the numerical value of described PID calling interface in the hope of taking equipment property parameters subsequent time;

    User Defined Changing Pattern module, described User Defined Changing Pattern module comprises the structure of the configuration parameter preserving User Defined Changing Pattern, wherein, Custom class externally provides calling interface, and user transmits suitable parameter externally provides calling interface with the numerical value of equipment property parameters subsequent time to described Custom class;

    WithChanging Pattern thread management module, described Changing Pattern thread management module opens a thread for a Parameter Variation, and automatically terminate described thread after change condition meets, and manage to open or terminate Changing Pattern thread to described thread according to Hash table;

    Handover module, described handover module provides Changing Pattern list to realize the switching between each Changing Pattern, and wherein, change Changing Pattern for add Changing Pattern in described Changing Pattern list, and changes the index marker sequence number of Changing Pattern execution;

    Read-write preserves the configuration data of each Changing Pattern with preservation module, described read-write with preserving module, and is kept in Changing Pattern storehouse, and wherein, described configuration data is kept in XML document;

    XML document index module, at every turn described read-write with preserve in module preserve a new XML document time, record is carried out in described XML document index module indexed file, and when dragging scroll bar in index frame, entry in index file is dynamically loaded in Hash table, and remains that the index entry quantity in described Hash table is constant with the memory headroom controlled shared by described index;

    Mathematical formulae parsing module, described mathematical formulae parsing module searches mathematical function title, and decompose character string according to function name, in substring, search parameter and operational symbol, analyze substring to obtain last Changing Pattern mathematic(al) representation according to described parameter and operational symbol afterwards.

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