Permeation barrier layer

Permeation barrier layer

  • CN 101,999,012 A
  • Filed: 01/26/2009
  • Published: 03/30/2011
  • Est. Priority Date: 01/25/2008
  • Status: Active Application
First Claim
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1. the preparation method of hydrogen permeation barrier thing may further comprise the steps:

  • A) deposition comprises at least one layer (L1 on matrix;

    L2;

    L3) layer system (LS);

    It is characterized in that step a) may further comprise the steps;

    B) deposit at least one and comprise the hydrogen barrier layer of ternary oxide (HPBL) at least.

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