Diaphragm and silicon capacitor microphone comprising same

Diaphragm and silicon capacitor microphone comprising same

  • CN 102,065,354 A
  • Filed: 04/19/2010
  • Published: 05/18/2011
  • Est. Priority Date: 04/19/2010
  • Status: Active Application
First Claim
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1. vibrating diaphragm, its involving vibrations portion and the support portion that links to each other with the vibration section, the outer of this support portion self-excited oscillation portion circumferentially extends away from the vibrating diaphragm center position, the support portion is provided with first surface, with first surface opposing second surface and the sidewall that first surface is connected with second surface, this sidewall comprises the first side wall and second sidewall relative with the first side wall, the first side wall and second sidewall are respectively perpendicular to vibration section and support portion joint face, it is characterized in that:

  • described support portion comprises first groove that is provided with first opening and second groove that is provided with second opening, described first groove extends to the first side wall from second sidewall, first opening is located at the first side wall, second groove extends to second sidewall from the first side wall, second opening is located at second sidewall, and the first side wall and second sidewall are staggered is oppositely arranged.

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