The polisher lapper improved

The polisher lapper improved

  • CN 102,066,052 B
  • Filed: 06/04/2009
  • Issued: 03/02/2016
  • Est. Priority Date: 06/20/2008
  • Status: Active Grant
First Claim
Patent Images

1. the polisher lapper improved, comprising:

  • Pedestal, described pedestal has bowl, the driving-disc of rotation and driving-disc drive unit, and described driving-disc is suitable for supporting platen;

    Head, described head is arranged to support sample holder and first drive unit with the rotating drive for sample holder, described head have for mobile described head and described sample holder close to and away from the second drive unit of platen, described head comprises load cell sum counter, is connected with the first drive unit, described counter setting is close and away from the movement of platen and mobile degree for determining head this load cell operable;

    Driving screw, described driving screw is used for mobile described sample holder and is toward or away from described platen, described driving screw is connected to described counter, wherein driving screw gear is assemblied on described driving screw, and described counter by with described driving screw gears meshing and drive by its pinion driven, pinion described in wherein said driving screw gear ratio is large, and driving screw is mounted to be rotated for together with belt pulley over pulleys carried;

    AndControl system, for controlling the first drive unit or the second drive unit.

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