Batch-type heat treatment device and be applicable to the heater of this annealing device

Batch-type heat treatment device and be applicable to the heater of this annealing device

  • CN 102,067,294 B
  • Filed: 07/16/2009
  • Issued: 10/19/2016
  • Est. Priority Date: 07/16/2008
  • Status: Active Grant
First Claim
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1. multiple substrates are carried out heat treatment, it is characterised in that include by a batch-type heat treatment device simultaneously:

  • Chamber, provides heat treatment space to the plurality of substrate;

    Multiple main heating units, the stacked direction along described substrate configures at predetermined intervals, described main heating unit include byBeing arranged in multiple unit primary heaters that the heater of lid and described cover inside is constituted, described unit primary heater is rodShape;

    Cassette, the sky between described unit primary heater and the adjacent unit primary heater of the inside being arranged in described chamberBetween, and mutually do not support with described unit heater, load the plurality of substrate, and support described substrate the first side and withThe second side in opposite directions, described first side;

    Gas supply part, towards the first side of described substrate, and supplies process gas to described chamber interior;

    AndGas discharge section, is arranged opposite to each other with described gas supply part, towards the second side of described substrate, and from described chamberInternal discharge waste gas,Wherein, described substrate is arranged between the plurality of main heating unit,The plurality of unit primary heater configures across predetermined distance, and described unit primary heater is configured to run through described chamberTwo sides, and by being positioned at the part of described unit primary heater of described chamber interior to directly heat described substrate.

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