Laser processing

Laser processing

  • CN 102,069,296 B
  • Filed: 11/04/2010
  • Issued: 09/07/2016
  • Est. Priority Date: 11/09/2009
  • Status: Active Grant
First Claim
Patent Images

1. a laser processing, including:

  • Modified layer forming step, by scanning in object to be processed with the convergent point of the first laserPortion, forms modified layer, and the process velocity that what described modified layer had utilize the second laser to carry out is lowIn the process velocity to non-modified part, and described modified layer becomes the limit of laser processing areaBoundary;

    AndRemoval step, by irradiating described non-modified part with the second laser, removal scope is from treatingThe surface of processing object is to the described non-modified part of described modified layer.

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