Method and device for recycling heat energy in reduction exhaust in polysilicon production process

Method and device for recycling heat energy in reduction exhaust in polysilicon production process

  • CN 102,070,145 A
  • Filed: 12/06/2010
  • Published: 05/25/2011
  • Est. Priority Date: 12/06/2010
  • Status: Active Grant
First Claim
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1. the method that the reduction exhaust heat-energy is recycled in the production of polysilicon is characterized in that, comprises following process:

  • reduction tail gas and the heat exchange of chlorosilane in tower bottom reboiler;

    Chlorosilane is partly vaporized after the heat exchange, and is transported in the chlorosilane purification tower, and as the thermal source of chlorosilane purification tower, the reduction tail gas after the heat exchange is transported in the condenser, the chlorosilane in the reduction tail gas is condensed into liquid, and is transported in the chlorosilane purification tower.

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