Exposure menu creation method

Exposure menu creation method

  • CN 102,074,452 A
  • Filed: 11/24/2009
  • Published: 05/25/2011
  • Est. Priority Date: 11/24/2009
  • Status: Active Grant
First Claim
Patent Images

1. an exposure menu method for building up is characterized in that, when setting up the exposure menu, makes the notch direction of wafer vertical with the photomask board long side direction.

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