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Sintered complex oxide, method for producing sintered complex oxide, sputtering target and method for producing thin film

Sintered complex oxide, method for producing sintered complex oxide, sputtering target and method for producing thin film

  • CN 102,089,257 A
  • Filed: 07/14/2009
  • Published: 06/08/2011
  • Est. Priority Date: 07/15/2008
  • Status: Active Application
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