Sintered complex oxide, method for producing sintered complex oxide, sputtering target and method for producing thin film
Sintered complex oxide, method for producing sintered complex oxide, sputtering target and method for producing thin film
- CN 102,089,257 A
- Filed: 07/14/2009
- Published: 06/08/2011
- Est. Priority Date: 07/15/2008
- Status: Active Application