Writing strategy

Writing strategy

  • CN 102,113,083 A
  • Filed: 06/04/2009
  • Published: 06/29/2011
  • Est. Priority Date: 06/04/2008
  • Status: Active Application
First Claim
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1. methods of target being exposed by a plurality of son bundles, this method comprises:

  • -a plurality of son bundles are provided, described a plurality of son bundles are arranged to array;

    -target that be exposed is provided;

    Relatively moving on first direction between described a plurality of son bundles of-generation and the described target;

    -at the second party described a plurality of son bundle that moves up, make each son bundle a plurality of parallel scanning beams of exposure on described target;

    Wherein said relatively moving and, making by the distance between the adjacent parallel scan line of described a plurality of son bundle exposure on first direction less than the projection pitch P on first direction between the child bundle of a plurality of son bundles in the array described a plurality of son bundles moving on second direction Proj, X

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