Use of a target for spark evaporation, and method for producing a target suitable for said use

Use of a target for spark evaporation, and method for producing a target suitable for said use

  • CN 102,124,138 A
  • Filed: 08/10/2009
  • Published: 07/13/2011
  • Est. Priority Date: 08/17/2008
  • Status: Active Application
First Claim
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1. the application of target, this target is used for spark evaporation coating with preparation metal oxide layer and/or metal nitride layer, wherein, use a kind of target, in this target the non-conductive oxide compound of the metal of this target and/nitride introduces in the metal matrix of this target, and this target can be in being higher than target moves under the temperature of the fusing point of used metal thus.

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