Reactor and system for producing polycrystalline silicon

Reactor and system for producing polycrystalline silicon

  • CN 102,134,745 A
  • Filed: 04/08/2010
  • Published: 07/27/2011
  • Est. Priority Date: 04/08/2010
  • Status: Active Grant
First Claim
Patent Images

1. reactor that is used to produce polysilicon, it comprises chassis and the cylindrical shell that covers on the described chassis, be provided with many on the described chassis thick and fast to silicon core print seat, at least one inlet mouth and at least one venting port, silicon core print seat center, inlet mouth center and venting port center constitute the center dot matrix together on described chassis, it is characterized in that:

  • at least a portion central point of described center dot matrix all equates with the distance between the adjacent center point.

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