For removing the method for the pollutent of reactor

For removing the method for the pollutent of reactor

  • CN 102,140,628 B
  • Filed: 11/04/2010
  • Issued: 12/02/2015
  • Est. Priority Date: 11/04/2009
  • Status: Active Grant
First Claim
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1. , for a method for the metal pollutant and/or metal oxide pollutent that remove vacuum coat inside reactor, said method comprising the steps of:

  • A) coating comprising a-Si silicon and μ

    c-Si silicon by deposition performs idle coating step thus pollutent embeds in described coating, wherein succeedingly performs the deposition of a-Si and μ

    c-Si to form described coating, and described coating is deposited to the thickness of 20nm to 80nm;

    AndB) remove described deposited coating at least in part, a plurality of deposition cycle be wherein provided,Wherein, perform in circulation in succession step a) with step b).

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