The manufacture method of nano-optical antenna array

The manufacture method of nano-optical antenna array

  • CN 102,148,429 B
  • Filed: 02/06/2010
  • Issued: 03/30/2016
  • Est. Priority Date: 02/06/2010
  • Status: Active Grant
First Claim
Patent Images

1. a manufacture method for nano-optical antenna array, it comprises the following steps:

  • One dielectric base is provided;

    By a plasma, hydrophilic treated is carried out to described dielectric base;

    Nano microsphere is scattered in a mixture, the Nano microsphere that in described mixture, Nano microsphere is 3nm ~ 5nm by diameter deviation forms, described dielectric base after hydrophilic treated is 9 °

    ±

    0.5 °

    with angle of inclination and slowly puts into mixture, described dielectric base is extracted slowly by mixture, form individual layer Nano microsphere the Nano microsphere in described mixture to be arranged on described dielectric base surface, described dielectric base is put into the speed of mixture and the speed that described dielectric base is extracted from mixture is 5mm/h;

    Being formed with the surperficial metal film of dielectric base of individual layer Nano microsphere, make the gap between metal filled adjacent nano microballoon;

    Remove Nano microsphere, reservation is filled in the metallic film in the gap between adjacent nano microballoon, forms nano-optical antenna array.

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