Rapid thermal processing lamphead with improved cooling

Rapid thermal processing lamphead with improved cooling

  • CN 102,150,248 A
  • Filed: 09/09/2009
  • Published: 08/10/2011
  • Est. Priority Date: 09/10/2008
  • Status: Active Application
First Claim
Patent Images

1. lamp holder that is used for heat treatment, it comprises:

  • Single piece, have a plurality of coolant channels and a plurality of lamp passage and a plurality of reflection cavity, wherein each lamp passage setting is to hold lamp, and each reflection cavity through configuration with as reflector or in order to receiving the replaceable reflector of described lamp, and wherein said a plurality of coolant channel is the contiguous described a plurality of lamp passages of configuration;

    AndAt least one hot transmission parts extends into each coolant channel from described single piece.

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