Device for reducing wall emerge loss for substrate processing apparatus

Device for reducing wall emerge loss for substrate processing apparatus

  • CN 102,157,326 A
  • Filed: 12/30/2010
  • Published: 08/17/2011
  • Est. Priority Date: 12/31/2009
  • Status: Active Application
First Claim
Patent Images

1. the wall energy loss of a substrate board treatment reduces device, it is characterized in that, comprising:

  • The liner backplate is arranged on the wall that comprises the corner part of chamber;

    AndCapacitor is inserted into the wall that runs through described chamber and in the hole that forms, is electrically connected with the rear of described liner backplate.

View all claims
    ×
    ×

    Thank you for your feedback

    ×
    ×