Manufacturing method of organic electroluminescence element and image display system

Manufacturing method of organic electroluminescence element and image display system

  • CN 102,157,444 A
  • Filed: 10/27/2006
  • Published: 08/17/2011
  • Est. Priority Date: 10/27/2006
  • Status: Active Application
First Claim
Patent Images

1. the manufacture method of an organic electroluminescent element comprises:

  • Substrate is provided, and this substrate comprises the pixel region that contains a plurality of pixels, wherein comprises first element area and second element area in each pixel;

    Form the patterning diaphragm in this second element area top;

    Form amorphous silicon layer in this substrate and this patterning diaphragm top;

    This amorphous silicon layer is carried out an excimer laser annealing process so that this amorphous silicon layer is converted into polysilicon layer;

    AndThis polysilicon layer of patterning, to form the first patterned polysilicon layer at this first element area, and form the second patterned polysilicon layer at this second element area, wherein the crystallite dimension of this first patterned polysilicon layer is greater than this second patterned polysilicon layer, form organic electroluminescent element by thisWherein the coefficient of heat conduction of this patterning diaphragm is greater than the coefficient of heat conduction of this substrate and this amorphous silicon layer.

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