Apparatus for efficient removal of halogen residues from etched substrates

Apparatus for efficient removal of halogen residues from etched substrates

  • CN 102,177,571 A
  • Filed: 10/02/2009
  • Published: 09/07/2011
  • Est. Priority Date: 10/07/2008
  • Status: Active Application
First Claim
Patent Images

1. cheese window, it comprises:

  • Convex parts, it has external margin;

    AndRing, it is connected to described convex parts, and described ring has;

    Outward flange;

    Inward flange, it is relative with described outward flange;

    AndLip, it makes progress angled and inwardly radially extends from described inward flange, and described lip is connected to the described external margin of described convex parts with sealing means.

View all claims
    ×
    ×

    Thank you for your feedback

    ×
    ×