Cholate photoacid generators and photoresists comprising same

Cholate photoacid generators and photoresists comprising same

  • CN 102,212,100 A
  • Filed: 12/10/2010
  • Published: 10/12/2011
  • Est. Priority Date: 12/10/2009
  • Status: Active Application
First Claim
Patent Images

1. light acid propellant compound, described compound are selected from following general formula (I) and (II):

  • Its formula of (I) and (II) be;

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