Acoustic resonator

Acoustic resonator

CN
  • CN 102,223,142 B
  • Filed: 08/13/2011
  • Issued: 09/10/2019
  • Est. Priority Date: 08/13/2011
  • Status: Active Grant
First Claim
Patent Images

1. a kind of acoustic resonator characterized by comprising(a) substrate;

  • (b) be formed in base internal or top is acoustically separated from device, and described one end for being acoustically separated from device edge is defined as the first boundary,The corresponding other end is defined as the second boundary;

    (c) it is formed in the first electrode being acoustically separated from device;

    (d) piezoelectric layer on the first electrode is formed;

    (e) second electrode over the piezoelectric layer is formed, the one end at the second electrode edge is defined as the first boundary, correspondingThe other end is defined as the second boundary, and wherein the edge of second electrode is located at the inside for being acoustically separated from device edge;

    (f) liner over the piezoelectric layer is formed, the side wall of the liner is opposite with second electrode, and the profile of the side wall is wallOne of facial contour, stepped profile, curved profile, gradual course or their combination, liner surround the side of second electrodeEdge and it is located at and is acoustically separated from the inside at device edge, the distance between the liner and second electrode edge is defined as third distanceD3, when the liner is formed by dielectric material, then 0≤

    D3≤

    20 μ

    m;

    When the liner by with the first and second electrode phasesSame or entirely different metal material is formed, then 0 D3≤

    20 μ

    m <

    .

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