Fluorine contained composition and application thereof

Fluorine contained composition and application thereof

  • CN 102,227,518 B
  • Filed: 11/19/2009
  • Issued: 05/27/2015
  • Est. Priority Date: 11/28/2008
  • Status: Active Grant
First Claim
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1. polyvinylpyrrolidone--type polymer is suppressing fluoro-containing composition to the application in polysilicon erosion rate, wherein said polyvinylpyrrolidone--type polymer is added in described fluoro-containing composition, and described fluoro-containing composition is also containing fluorochemical and carrier, wherein, described polyvinylpyrrolidone--type polymer is homopolymer and/or multipolymer, and described fluorochemical is one or more in the salt that formed of hydrogen fluoride, ammonium bifluoride and hydrogen fluoride and alkali.

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