Method for manufacturing solar battery cell

Method for manufacturing solar battery cell

  • CN 102,239,565 A
  • Filed: 12/02/2008
  • Published: 11/09/2011
  • Est. Priority Date: 12/02/2008
  • Status: Active Application
First Claim
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1. the manufacture method of a solar battery cell is characterized in that, comprising:

  • The 1st operation forms the passivating film that is made of silicon nitride film in the one side side of the polysilicon substrate of the 1st conduction type by plasma CVD method;

    The 2nd operation makes the Elements Diffusion of the 2nd conduction type form diffusion layer in the another side side of described polysilicon substrate by thermal diffusion, forms pn knot portion;

    The 3rd operation forms the antireflection film that is made of silicon nitride film by plasma CVD method on described diffusion layer;

    The 4th operation disposes the 1st electrode cream in the another side side of described polysilicon substrate;

    The 5th operation, configuration the 2nd electrode cream on described passivating film;

    AndThe 6th operation, described the 1st electrode cream of roasting and described the 2nd electrode cream form electrode.

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