Ion source

Ion source

  • CN 102,263,005 A
  • Filed: 06/27/2011
  • Published: 11/30/2011
  • Est. Priority Date: 06/27/2011
  • Status: Active Application
First Claim
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1. ion source, it is characterized in that, comprise power supply, the discharge body that can produce ion and ion extraction electrode, the high-pressure side of discharge body connects power supply, low-pressure end is by current-limiting resistance R1 ground connection, one end of ion extraction electrode connects the high-pressure side of described discharge body by divider resistance R3, and the other end is by divider resistance R2 ground connection.

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