Method for measuring steady state stability of plate-making etching equipment

Method for measuring steady state stability of plate-making etching equipment

CN
  • CN 102,289,153 A
  • Filed: 05/31/2011
  • Published: 12/21/2011
  • Est. Priority Date: 05/31/2011
  • Status: Active Grant
First Claim
Patent Images

1. plate-making lithographic equipment static stability measuring method is characterized in that:

  • may further comprise the steps;

    (1) on the mask plate of mobile platform, makes specific telltale mark, and mask plate is adsorbed on the mobile platform by the vacuum suction technology;

    (2) object lens are placed mask plate top and objective lens alignment mask plate straight down, adjust mobile platform, the telltale mark on the mask plate is moved in the objective angular field, adopt the CCD camera to gather mask plate image on the mobile platform by object lens;

    (3) the CCD camera is gathered specifically labelled image on the mask plate, utilize image processing techniques to obtain the side-play amount at telltale mark center and objective angular field center on the mask plate, the telltale mark that drives on the mask plate by mobile platform moves corresponding offset to the objective angular field center, and record mobile platform this moment is at the magazine coordinate of CCD;

    (4) keep the mobile platform transfixion, per interval time, t adopted specifically labelled image on mask plate of CCD camera collection at interval, and obtain in each time interval t side-play amount of location mark center with respect to the objective angular field center by image processing techniques, through the repeated acquisition of n time interval t, obtain locating in each time interval the side-play amount of mark center with respect to the objective angular field center;

    (5) the telltale mark center in n the time interval t of described step (4) collection is lithographic equipment static drift amount with respect to the side-play amount at objective angular field center.

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