Nano-patterned substrate and preparation method thereof and light emitting diode

Nano-patterned substrate and preparation method thereof and light emitting diode

  • CN 102,299,219 A
  • Filed: 08/29/2011
  • Published: 12/28/2011
  • Est. Priority Date: 08/29/2011
  • Status: Active Application
First Claim
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1. the preparation method of a nano patterning substrate is characterized in that, comprising:

  • One first Sapphire Substrate is provided;

    Preparation one metallic aluminium thin layer on described first Sapphire Substrate;

    Described metallic aluminium thin layer anodic oxygen is changed into the aluminium oxide with even loose structure;

    Described aluminium oxide is changed into second Sapphire Substrate with even loose structure.

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