Capacitive gage pressure sensor with vacuum dielectric

Capacitive gage pressure sensor with vacuum dielectric

  • CN 102,356,307 B
  • Filed: 03/02/2010
  • Issued: 04/08/2015
  • Est. Priority Date: 04/23/2009
  • Status: Active Grant
First Claim
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1. a capacitive character gauge pressure transmitter, comprising:

  • Capacitive gage pressure sensor, comprising;

    Sensor main body, defines main chamber in described sensor main body;

    Thin annular diaphragm, is deployed in main chamber, and described main chamber is divided into Part I and Part II, forms vacuum electric medium under described Part II is in vacuum state;

    Air, with reference to mouth, is formed in described sensor main body, and makes the Part I in chamber be held in environment atmospheric pressure;

    Process media inlet, is configured to the source being coupled to process medium;

    The deflectable diaphragm of conduction, is deployed between the Part II in chamber and described process media inlet;

    At least one capacitive plates, relatively be deployed in the Part II in chamber with barrier film, thus the change of the electric capacity of bending generation between at least one capacitive plates and deflectable diaphragm of conduction of the deflectable diaphragm of described conduction, the gauge pressure of described electric capacity instruction process medium;

    Be placed in the insulator body of the Part II in chamber, at least one capacitive plates described is deployed in insulator body;

    AndBeing placed in the low bulk pad between insulator body and the deflectable diaphragm of conduction, being beneficial to deflectable diaphragm the bending when being subject to the pressure of process medium of described conduction.

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