Method for verifying concentration of developer solution

Method for verifying concentration of developer solution

  • CN 102,375,349 A
  • Filed: 08/18/2010
  • Published: 03/14/2012
  • Est. Priority Date: 08/18/2010
  • Status: Active Application
First Claim
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1. the verification method of a solution level may further comprise the steps:

  • Step 1 is divided into a plurality of fritters with the exposure area of the disk that is coated with photoresist, uses the exposure energy of increasing or decreasing to make public successively to each fritter, and notes the exposure energy value of each fritter;

    Step 2 uses the developer solution of being verified that said photoresist is developed;

    Step 3 is found out the fritter with developer solution sufficient reacting and inadequate first sufficient reacting of boundary, and finds corresponding exposure energy value;

    Step 4 compares exposure energy value and the standard value found in the step 3, thereby judges whether solution level is up to standard.

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