Target capable of preventing stripping of reverse sputtered material and forming method of film layer

Target capable of preventing stripping of reverse sputtered material and forming method of film layer

  • CN 102,383,100 A
  • Filed: 11/22/2011
  • Published: 03/21/2012
  • Est. Priority Date: 11/22/2011
  • Status: Active Application
First Claim
Patent Images

1. a target that prevents that the reverse sputtering material from peeling off is characterized in that, the edge that treats sputtering surface of said target has the annular knurl district.

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