Target based on molybdenum and production method with thermal projection of a target

Target based on molybdenum and production method with thermal projection of a target

  • CN 102,388,159 A
  • Filed: 04/12/2010
  • Published: 03/21/2012
  • Est. Priority Date: 04/10/2009
  • Status: Active Application
First Claim
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1. the target with nominal thickness that comprises at least a molybdenum based compound is characterised in that it has:

  • -stratiform microstructure;

    -be lower than 1000ppm, be preferably lower than 600ppm, even more preferably be lower than the oxygen level of 450ppm;

    -be lower than five times, preferably three times of theoretical resistivity of this compound, more preferably duple resistivity.

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