Trichlorosilane synthesis process and equipment

Trichlorosilane synthesis process and equipment

  • CN 102,390,836 B
  • Filed: 08/23/2011
  • Issued: 11/25/2015
  • Est. Priority Date: 08/23/2011
  • Status: Active Grant
First Claim
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1. a trichlorosilane synthesizing equipment, comprising:

  • Hydrogenchloride storage tank (1), for storing hydrogen chloride gas;

    For the synthetic furnace (2) of trichlorosilane building-up reactions, described synthetic furnace is connected with described hydrogenchloride storage tank and receives hydrogen chloride gas from it, in described synthetic furnace, also add silica flour, silica flour and hydrogen chloride gas precursor reactant generate the mixture of trichlorosilane, dichlorosilane and silicon tetrachloride;

    The condenser (3) be connected with described synthetic furnace, described condenser from synthetic furnace receive reaction generate described mixture and by described mixture condensation;

    First rectifying tower (5), the entrance of described first rectifying tower is connected with condenser, and described first rectifying tower receives the mixture be condensed, for isolating dichlorosilane from the mixture be condensed;

    Second distillation column (6), the entrance of described Second distillation column is connected with at the bottom of the first rectifying tower, and described Second distillation column receives still liquid at the bottom of the first rectifying tower, for from wherein isolating silicon tetrachloride;

    The chlorosilane storage tank (7) be connected respectively with the first and second rectifying tower is set, this chlorosilane storage tank receives isolated dichlorosilane from the first rectifying tower and receives isolated silicon tetrachloride from Second distillation column, and stores the dichlorosilane and silicon tetrachloride that receive;

    WithThe vaporizer (8) be connected with synthetic furnace with chlorosilane storage tank, described vaporizer is received from chlorosilane storage tank (7) and is separated by the first rectifying tower the liquid dichlorosilane that obtains and is separated the liquid silicon tetrachloride obtained by Second distillation column, and returns synthetic furnace by after liquid dichlorosilane and silicon tetrachloride vaporization.

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