Equipment and method for repairing poor protrusions of substrate

Equipment and method for repairing poor protrusions of substrate

  • CN 102,446,788 A
  • Filed: 09/30/2010
  • Published: 05/09/2012
  • Est. Priority Date: 09/30/2010
  • Status: Active Application
First Claim
Patent Images

1. the protruding bad equipment of repaired substrate is characterized in that, comprising:

  • Spin finishing spare is used to grind protruding bad on the said substrate;

    Rotary drive system is used to drive said spin finishing spare rotation;

    Motion driving system is used to drive the motion of said spin finishing spare along continuous straight runs and vertical direction.

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