Method for forming optical platform

Method for forming optical platform

  • CN 102,479,889 A
  • Filed: 11/30/2010
  • Published: 05/30/2012
  • Est. Priority Date: 11/30/2010
  • Status: Active Application
First Claim
Patent Images

1. a method that forms optical table is characterized in that, comprising:

  • Substrate is provided;

    Utilize the said substrate of dry etching figureization, form groove;

    The said patterned substrate of oxidation for the first time forms oxide-film on the surface of patterned substrate and the surface of groove;

    The substrate of graphical said bottom portion of groove and oxide-film, the through hole of formation device mesa, device mesa both sides;

    The said substrate of oxidation for the second time is at the sidewall formation oxide-film of said through hole;

    Plated metal covers the oxide-film of said substrate top surface, lower surface, bottom portion of groove and sidewall and through-hole side wall.

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