The effective surface relief microstructure of optics and manufacture method thereof

The effective surface relief microstructure of optics and manufacture method thereof

  • CN 102,495,525 B
  • Filed: 05/07/2007
  • Issued: 09/09/2015
  • Est. Priority Date: 05/12/2006
  • Status: Active Grant
First Claim
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1. have a manufacture method for the mask of the micromechanism in the firstth different district of transparency and the secondth district, the method comprises the following steps:

  • The film (43) with the corrugated surface structure of topological structure is deposited in layer of mask material (42);

    Reduce the thickness of described film (43) until corrugated surface lower region in membrane material be eliminated and expose a part (44) for underlying mask material;

    AndRemove the exposed portion (44) of described mask, make layer (42) have the special micromechanism hole (44) corresponding with the lower region of the corrugated surface of film (43).

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