TFT-LCD glass substrate washing method

TFT-LCD glass substrate washing method

  • CN 102,601,074 B
  • Filed: 03/19/2012
  • Issued: 08/12/2015
  • Est. Priority Date: 03/19/2012
  • Status: Active Grant
First Claim
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1. a TFT-LCD glass substrate washing method, is characterized in that, comprises the steps:

  • Step 1, provide supersonic wave cleaning machine, glass substrate inlet conveyor and glass substrate export conveyer, this supersonic wave cleaning machine comprises rinse bath, is contained in the cleaning fluid in rinse bath and is located at several first ultrasonic frequency generator of rinse bath and several second ultrasonic frequency generator, and this first ultrasonic frequency generator is different from the frequency of the second ultrasonic frequency generator;

    Step 2, glass substrate inlet conveyor transmit glass substrate to be cleaned and enter rinse bath;

    Step 3, glass substrate to be cleaned are immersed in the cleaning fluid of rinse bath;

    The different frequency ultrasonic wave that step 4, this first ultrasonic frequency generator and the second ultrasonic frequency generator produce is applied to cleaning fluid and carries out Ultrasonic Cleaning to glass substrate;

    Step 5, glass substrate export conveyer and transport out from rinse bath by cleaned glass substrate;

    The two lateral walls of this rinse bath is respectively equipped with this several first ultrasonic frequency generator and several second ultrasonic frequency generator, and this two lateral walls of rinse bath is parallel with the direction of transmitting glass substrate;

    In described step 3, the two lateral walls that glass substrate corresponds to described rinse bath tilts to be placed in rinse bath, and the angle between this glass substrate and horizontal plane is 30-45 °

    ;

    This several first ultrasonic frequency generator and several second ultrasonic frequency generator are distinguished arranged in columns, and are disposed on the two lateral walls of rinse bath successively;

    The frequency of this first ultrasonic frequency generator and the second ultrasonic frequency generator is respectively 40KHz and 120KHz, and the spacing between the first adjacent ultrasonic frequency generator and the second ultrasonic frequency generator is 25-50cm;

    Described cleaning fluid is deionized water.

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