Device and method for prebaking polyemid by supporting base plate with temperature control pins

Device and method for prebaking polyemid by supporting base plate with temperature control pins

  • CN 102,633,442 A
  • Filed: 04/19/2012
  • Published: 08/15/2012
  • Est. Priority Date: 04/19/2012
  • Status: Active Application
First Claim
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1. a temperature control pin supporting substrate carries out the pre-dried device of alignment film;

  • It is characterized in that;

    Comprise the well heater that is used for predrying substrate, be used for the upwards some temperature control pins and the temperature control system of supporting substrate from substrate below;

    Said temperature control pin is connected to said temperature control system, and each said temperature control pin can be by said temperature control system independent control temperature so that on the substrate Support Position of temperature control pin and Support Position around be heated evenly.

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