Process and system for producing trichlorosilane

Process and system for producing trichlorosilane

  • CN 102,639,440 A
  • Filed: 08/02/2010
  • Published: 08/15/2012
  • Est. Priority Date: 08/04/2009
  • Status: Active Application
First Claim
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1. the method for preparing Trichloromonosilane;

  • Wherein make silicon grain and silicon tetrachloride and hydrogen and randomly in fluidized-bed reactor (101), react and form the product gas stream that contains Trichloromonosilane with hydrogenchloride;

    Said fluidized-bed reactor (101) has at least one and is used for silicon tetrachloride and hydrogen and the inlet of hydrogenchloride (103) randomly;

    At least one is used for forming with silicon tetrachloride and hydrogen the inlet (105) of the silicon grain of fluidized-bed;

    Be used to contain the outlet (117) of the product gas stream of Trichloromonosilane with at least one;

    There is at least one particle separator (118) that the silicon grain until specific maximum particle diameter can be passed through this outlet (117) front, be characterised in that preferably regularly or continuously via at least another not with the outlet (109 of said particle separator (118);

         112) from reactor drum (101), discharge silicon grain.

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