Realize the method for the island of lax at least partly strain gauge material

Realize the method for the island of lax at least partly strain gauge material

  • CN 102,693,902 B
  • Filed: 03/20/2012
  • Issued: 05/11/2016
  • Est. Priority Date: 03/25/2011
  • Status: Active Grant
First Claim
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1. in target substrate, be formed to a method for the island of the strain gauge material that small part is lax, described methodComprise the following steps:

  • A) island (1231) of formation (S11) strain gauge material on the side of the first substrate (1110);

    It is characterized in thatB) make described the first substrate on the side of the island that comprises described strain gauge material with described target substrate(3170) bonding (S31);

    WithC) after adhesion step, described the first substrate is separated with described target substrate, and by the first heat treatmentMake island lax (S41) at least partly of described strain gauge material,Described method is further comprising the steps of;

    E) in step a) before, on the side of described the first substrate, form crystal seed layer (1120),Wherein,Step a) in, the island of described strain gauge material is formed on described crystal seed layer,Described method is further comprising the steps of;

    F) in step b) before, in the region (2260,2261) in the described crystal seed layer on described the first substrate orIn described the first substrate, inject (S22) ionic species, weaken layer thereby form,Step c) in, heat-treat so that described reduction layer separates, and step c) in, described separation and instituteState lax generation simultaneously,In described the first heat treatment process, change heating-up temperature with the speed of 1 DEG C/min~

    50 DEG C/min.

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