Improved laser annealing device

Improved laser annealing device

  • CN 102,699,529 A
  • Filed: 05/30/2012
  • Published: 10/03/2012
  • Est. Priority Date: 05/30/2012
  • Status: Active Application
First Claim
Patent Images

1. improved laser annealing apparatus;

  • It is characterized in that;

    Comprise laser beam, shell, at the laser beam output window of this shell top side, be used to carry the substrate of treating annealed material and the movably protection piece between this laser beam output window and substrate in this shell bottom side;

    This protection piece is inclined to set with respect to horizontal direction;

    This protection piece is provided with the slit that connects its upper and lower surfaces, and this laser beam is mapped on this substrate through keeping passing this slit behind this laser beam output window vertically downward again.

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