Polysilicon reducing furnace

Polysilicon reducing furnace

CN
  • CN 102,701,209 B
  • Filed: 03/28/2011
  • Issued: 04/15/2015
  • Est. Priority Date: 03/28/2011
  • Status: Active Grant
First Claim
Patent Images

1. a polycrystalline silicon reducing furnace, comprises body of heater and chassis, described chassis has multipair equally distributed electrode, and the arrangement of described electrode is cellular, is specially:

  • Described center chassis has six electrodes, and point is in arranged in regular hexagon shape centered by the center on described chassis for described six electrodes, and described six electrodes lay respectively at described orthohexagonal six summits place;

    Centered by described regular hexagon, other electrode is outwards arranged successively, and, the circle that it is the center of circle that the line of outermost layer electrode is approximately with the center on described chassis;

    Every two interelectrode minor increments are 130mm-260mm;

    Arrange a silicon core between every two electrodes, the distance between the center of outermost layer silicon core and the inner tube wall of described polycrystalline silicon reducing furnace is 100mm-300mm;

    With the center on described chassis for the center of circle, the region being provided with silicon core is equally divided into the fan section that 6 angles are 60 °

    , silicon core decoration form in each fan section is symmetrical about center chassis, and, six electrodes being positioned at described center chassis place are connected with outer field electrode respectively, to arrange six silicon cores at described center chassis place, the electrode logarithm that described chassis is arranged be 6 to, 18 to, 36 to, 60 to, 90 right;

    Or, with the center on described chassis for the center of circle, the region being provided with silicon core is equally divided into the fan section that 3 angles are 120 °

    , and the silicon core decoration form in each fan section is symmetrical about center chassis, the electrode logarithm that described chassis is arranged be 3 to, 42 to, 48 to, 54 to, 63 to, 84 right.

View all claims
    ×
    ×

    Thank you for your feedback

    ×
    ×