Transfer robot with substrate cooling

Transfer robot with substrate cooling

  • CN 102,714,171 A
  • Filed: 01/14/2011
  • Published: 10/03/2012
  • Est. Priority Date: 01/22/2010
  • Status: Active Application
First Claim
Patent Images

1. substrate transfer robot comprises:

  • End effector;

    The top assembly, said top assembly is coupled to said end effector, and can operate so that said end effector is linear mobile;

    Lower component, said lower component are coupled to said top assembly, and can operate so that rotation of said top assembly and vertical moving;

    AndOne or more coldplates, said one or more coldplates are attached to said top assembly and are positioned at said end effector below.

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