Plasma processing apparatus and liner assembly for tuning electrical skews

Plasma processing apparatus and liner assembly for tuning electrical skews

  • CN 102,860,138 A
  • Filed: 07/06/2011
  • Published: 01/02/2013
  • Est. Priority Date: 07/21/2010
  • Status: Active Application
First Claim
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1. liner assembly that is used for plasma processing apparatus, described liner assembly comprises:

  • Cylinder-shaped body, described cylinder-shaped body has outer wall, described outer wall through adjusted size with the sidewall that slips into described plasma processing apparatus in, described cylinder-shaped body has a plurality of slits, described slit passes that described cylinder-shaped body forms and with the polarity array configurations, wherein, at least one slit in the described slit is configured to allow substrate to pass through described bushing pipe.

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