Negative photosensitive resin laminate and use of negative photosensitive resin laminate

Negative photosensitive resin laminate and use of negative photosensitive resin laminate

  • CN 102,937,776 B
  • Filed: 12/15/2008
  • Issued: 04/19/2017
  • Est. Priority Date: 12/18/2007
  • Status: Active Grant
First Claim
Patent Images

1. a kind of negative photosensitive resin layered product, its be for by using the i rays monochromatic light of projection photomask picture and everyThe negative photosensitive resin layered product that lens are exposed to negative photosensitive resin layer and form resist solidfied material,It at least has the negative photosensitive resin layer (B) of supporter (A) and i ray monochromatic exposures,Aforementioned negative photosensitive resin layer (B) is formed by the negative light-sensitive resin combination of i ray monochromatic exposures, the iThe negative light-sensitive resin combination of ray monochromatic exposure contains:

  • (a) carboxyl-content with acid equivalent basis as 100~

    600 and weightBinder resin 20~

    90 mass %, the unsaturated chemical combination of (b) photopolymerization of the average molecular weight between 5000~

    500000Mass % of thing 3~

    70 and mass % of (c) Photoepolymerizationinitiater initiater 0.1~

    20, also,Light transmittance of the aforementioned negative photosensitive resin layer (B) under wavelength 365nm be less than more than 25% 50%, thickness be 5~

    25 μ

    m,As aforementioned (c) Photoepolymerizationinitiater initiater, containing in the group constituted selected from benzophenone and benzophenone derivates extremelyFew a kind of compound and 2, both 4,5- triarylimidazoles dimers, and the benzophenone and benzophenone derivatesContent is generally 0.05~

    0.125 mass % relative to aforementioned negative photosensitive resin layer (B),Compound and following logical formula (II)s that the unsaturated compound of aforementioned (b) photopolymerization is represented selected from following logical formula (I)sThe compound group of expression into group:

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