Physical quantity sensor and electronic apparatus

Physical quantity sensor and electronic apparatus

  • CN 102,955,045 A
  • Filed: 08/16/2012
  • Published: 03/06/2013
  • Est. Priority Date: 08/17/2011
  • Status: Active Grant
First Claim
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1. physical quantity transducer is characterized in that possessing:

  • Substrate is provided with the first recess on it;

    Sensor section, it is configured on described the first recess, and the support by extending at the first direction of principal axis, and is supported in the mode that can swing at the depth direction of described the first recess,Described sensor section is divided into first and second portion take described support as the boundary, possesses movable electrode section in described first and described second portion, and, the quality of comparing described second portion with described first is larger, at least one party in described first and described second portion is provided with through holeDescribed substrate is in possessing fixed electorde section in the position of overlooking when observing and described movable electrode section is overlapping,And, in the position of overlooking when observing and the top of described sensor section is overlapping, be provided with the second dark recess of comparing with described the first recess.

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