Sensor capable of reducing error

Sensor capable of reducing error

  • CN 103,076,133 A
  • Filed: 12/26/2012
  • Published: 05/01/2013
  • Est. Priority Date: 12/26/2012
  • Status: Active Application
First Claim
Patent Images

1. the sensor that can reduce error is characterized in that structure is comprised of the diaphragm of first substrate, second substrate, the 3rd substrate, heating resistor, through hole, first substrate, the cavity of first substrate, the diaphragm of second substrate, the cavity of second substrate.

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