Graphene, and preparation method and application thereof

Graphene, and preparation method and application thereof

CN
  • CN 103,101,907 B
  • Filed: 11/15/2011
  • Issued: 09/17/2014
  • Est. Priority Date: 11/15/2011
  • Status: Active Grant
First Claim
Patent Images

1. a graphene preparation method, comprises the steps:

  • The substrate that plays katalysis is put into reaction chamber, vacuumize;

    Substrate temperature is adjusted to 400 DEG C~

    500 DEG C, passes into the gas of inertia, keep 1 minute~

    60 minutes, make to keep in reaction chamber oxygen-free atmosphere;

    By radio frequency glow discharge, the γ

    -ray emission plasma body that provocative reaction is indoor;

    To the organic gas that passes into 10sccm~

    200sccm in reaction chamber, make the speed that passes into of the gas of described inertia change by the speed of 10sccm/ minute~

    50sccm/ minute simultaneously, react 1~

    300 minute, obtain Graphene.

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